The IC dust-free workshop is a clean room to meet the requirements of semiconductor manufacturing process. The dust-free workshop has certain requirements for environmental cleanliness, temperature and humidity, vibration, ESD, AMC control and so on. Compared with other industrial cleanrooms, the dust-free workshop of IC manufacturing has the characteristics of large area, high cleanliness level and high precision of temperature and humidity control.
According to the characteristics of air circulation in clean room workshop, clean room can be divided into three types: circulating air conditioner with high efficiency air supply system, circulating fan with wet seal system and FFU circulating system.
The first form is widely used in the design of small-scale and low-grade clean room workshop. For large-scale and high-grade clean workshop, there are some shortcomings, such as high operating cost and large occupied space.
The second form of design can meet the requirements of large area and high level of dust-free workshop in IC manufacturing, but the operation cost is high, and the adjustment of air speed and air volume in clean room is difficult, and the upgrading and transformation of the system is difficult, so the operation flexibility is very low.
The third kind of FFU cycle system not only saves operation space, has high cleanliness, safety, low operation cost, but also has high operational flexibility. It can upgrade and adjust the system at any time without affecting the production. All of these can well meet the needs of semiconductor manufacturing. Therefore, in semiconductor manufacturing industry, FFU cycle system is one by one. It has gradually become the most important purification design scheme.
The characteristics of FFU circulating system are as follows: the whole clean room is composed of static pressure layer, process layer, process auxiliary layer and return air passage. FFU provides power for circulating air. After mixing fresh air and circulating air, it is sent into process layer and process auxiliary layer through super high efficiency filter. The static pressure layer is negative pressure relative to process layer. In addition, there are production auxiliary areas for integrated circuit manufacturing plant equipment areas, including power supply, gas and chemicals supply, ultra-pure water supply and so on.
Integrated circuit manufacturing has stringent requirements for dust-free workshop environment control. Different processes require different cleanliness, such as photolithography in a level 1 micro-environment, and chemical mechanical grinding in a level 1,000 environment.
In addition, there are relevant regulations and requirements for noise, micro-vibration, illumination and so on in the clean room of integrated circuit manufacturing, especially for the control of vibration, which requires some requirements in the structural design of the clean room. (Reference No. Aide-188)
Good clean workshop design can not only save energy, reduce operating costs, reduce human input, but also provide safe and reliable guarantee for production. Among the three kinds of clean systems, FFU cycle system has the lowest operating cost and the highest cleanliness and safety. Therefore, FFU cycle system is mostly used in IC clean workshop. The higher the requirement of cleanliness, the higher the precision of temperature and humidity control, the higher the investment and operation cost of clean room. Therefore, in the case of relatively low requirement of ambient cleanliness or temperature and humidity, it is the design trend of IC manufacturing clean workshop to arrange some key technological equipment in higher cleanliness or temperature and humidity control area.
Integrated circuit manufacturing is a high energy-consuming industry, and the energy consumption of clean air-conditioning system accounts for more than 30%, so energy-saving and safe clean room design and various heat recovery design will be the future direction of development.
With the continuous upgrading of integrated circuit manufacturing technology, the mainstream large factories have entered the nano-era. The design, construction and energy-saving innovation of the clean workshop for integrated circuit manufacturing also need to be improved continuously to provide guarantee for the production of advanced process products.
The professional technicians of Ed Purification Engineering design a reasonable plan to adapt to the production process and the cost of the project. The design technical indicators meet the national standard of clean room. The experienced construction team of the purification project is fast and efficient, and the after-sales service is perfect.