The development of clean engineering both at home and abroad is accompanied by the development of scientific engineering and the rapid development of industrial products, especially the development of military industry, aerospace, electronics and biomedicine industries. The production of modern industrial products and modern scientific experiments require miniaturization, precision, high purity, high quality and high reliability. Miniaturized products, such as electronic computers, have evolved from the combination of several devices in several rooms to the present notebook computers. The electronic components used in the miniaturized products have evolved from electronic tubes to semiconductor separators to integrated circuits to VLSI. Only the line width of integrated circuits has evolved from a few microns to the present. It's about 0.1um today. Taking the miniaturization of integrated circuits as an example, the requirement of controlled particle size in air has developed from 0.3-0.5 um to 0.05 um or even smaller. It can be seen that the miniaturization of various industrial products is constantly putting forward stricter requirements for clean engineering. High-purity products, such as monocrystalline silicon materials for integrated circuits, silicon tetrachloride and faulty tetrachloride materials for optical fibers, have gone from the so-called high purity in the past to "electronic purity" and "ultra-purity". Only by achieving such high purity can the engineering characteristics required by modern integrated circuits, electronic components and optical fibers be achieved. 。 In order to produce such high purity products, it is necessary to achieve the corresponding level of air cleanliness in controlled production environment and ultra-pure water, ultra-pure gas, ultra-pure reagents with corresponding high purity in direct contact with products. It is self-evident that the high quality and reliability of products are of great importance in the electronic information age with the means of "micro-computer". It is also of special significance for the sterilization operation to ensure personal safety and for the production of modern genetic engineering and gene chip. Based on this trend, the development of clean engineering has become one of the indispensable important symbols of modern industrial production and scientific experiment activities.
Clean engineering in the 1960s has been widely used in the United States, Europe and other developed countries to meet the needs of product production and scientific experiment activities in all walks of life. It can be considered as a period of great development of clean engineering. In 1961, the United States gave birth to the first international clean room standard, the Air Force Engineering Ordinance 203, and entrusted the task of compiling federal government standards to the publishing body of the Atomic Energy Commission. At the end of 1963, the Federal Standard FS-209, the first military part, was promulgated. Since then, the Federal Standard "209" has become internationally prevalent and well-known. Clean room standards; The revised FS-209A was promulgated in 1966, and after the first satellite of the former Soviet Union was launched in 1957, the U.S. government accelerated the development of the aerospace industry, precision mechanical processing and electronic industry, all of which require a clean controlled air production environment, thus driving the development of clean Engineering and equipment manufacturing. 1961 The annual one-way flow cleaning project and the establishment of class 100 clean rooms have promoted the further development of clean engineering.
China's clean room project began in the early 1960s. In the 1970s, the design and construction of clean rooms for electronic industry, especially for semiconductor integrated circuits, developed a number of clean rooms, and successfully developed 100-grade one-way flow clean rooms. At the same time, equipment and materials for clean rooms, such as efficient filtration, developed rapidly. Clean workbench, laminar flow hood, clean oven, air blowing chamber and purified transfer window have been successfully developed and put into production. Although the manufacturing quality and some engineering indicators still lag behind the international level, they can meet some domestic needs. The assembled clean room, which is composed of high efficiency filters, purification equipment and enclosure structure (wall panels, roofs and floors), has been successfully developed. By the end of the 1970s, the development of clean room design, construction and clean Engineering in China had reached a mature stage.
The rapid development of LSI and VLSI in the 1980s greatly promoted the development of clean engineering. The production engineering of integrated circuits ranged from 64K bit to 4M bit, and the feature size ranged from 2.04M to 0.84m. At that time, according to practical experience, the relationship between particle size and linewidth was 1:10 in the controlled environment of air cleanliness. Therefore, the cleanliness engineer developed the ultra-high efficiency air filter, which can remove particles with particle size > 0.1pm to the prescribed range. According to the needs of large-scale and ultra-large scale integrated circuit production, the production engineering of high purity gas, water and reagents has also developed rapidly, which makes the clean engineering needed for high-level engineering products such as integrated circuits develop rapidly.
Shandong Aide Purification Engineering Co., Ltd. has strong technical strength and construction experience, according to the different needs of clean places, using professional equipment, to form different levels of clean standard space, to create the most suitable production and working environment. At present, it has established close cooperation with many enterprises and is a trustworthy professional purifying project implementer. Wechat Public Number: Aide-188