I. Source Analysis of Clean Room Energy Consumption
Clean room is indispensable in the development of modern science and technology, but the energy consumption in the process of keeping the clean room environment under control is also huge. For example, in the electronic industry, the general clean space needs 24 hours to operate normally every day. In order to ensure the cleanliness of production space, the air purification system has the least air exchange times. Also 15 times, up to several hundred times, the energy consumption of the clean room is mainly used for electricity and heat consumption of production equipment, power consumption, heat consumption and cooling load of purification air-conditioning system, advantages of refrigeration units, power consumption and heat consumption of exhaust devices, power consumption of super pure water and gas production and transportation, primary lighting and fire protection, etc.

In general 10,000-grade clean workshop, the power consumption of clean room equipment accounts for about 60% of the total, while in the general equipment, the chiller accounts for 64% of the total power consumption, followed by the MAU energy consumption of the new fan unit, and chiller chiller chiller chiller chiller chiller chiller chiller chiller chiller chiller chiller chiller chiller chiller. In the room, the energy consumption of the clean room system accounts for more than 50% of the total energy consumption of the plant. In various air-conditioning systems, the air-conditioning energy consumption of the clean room system is several to dozens of times that of the ordinary building air-conditioning. It can be seen that the energy consumption of clean room system is still very large. In the era of energy shortage and fierce competition in the world, how to use energy effectively and save energy is of great significance to the sustainable development of society and the reduction of cost and the improvement of competitiveness of enterprises.

2. Energy-saving Design of Clean Room
Reasonable planning of clean room should satisfy the demand, make good use of enough, and do not seek high and large space of clean room, which will cause a lot of energy waste in operation. The following principles can be considered in the design and planning of clean rooms:
(1) To meet the environmental requirements of the process;
(2) Safety and reliability of clean system operation;
(3) Improve the cost efficiency of the clean room system and try to ensure the reduction of operating costs.
In order to meet the above principles, we should consider the high cost of long-term operation in the later period, how to improve the efficiency of energy use and save energy use, which also directly affects the operation cost of enterprises. To calculate the cross-section wind speed of high-profile filter at the end of 0.3-0.5m/s, a square area ventilation capacity is 1080-1800m. 3/h, like thousands to tens of thousands of square meters of clean workshops in industry. If it runs 24 hours a day a year, the cost of maintaining the clean room operation is still quite high, in order to improve the energy cost efficiency in the later operation of the clean room. Consideration of cleanliness should be taken in the design of clean rooms.
1. On the premise of meeting the demand of technological production, it is most appropriate to reasonably reduce the space or area of the clean room to the minimum and improve the efficiency of the use of the clean room. For example, the positive pressure turbulent flow type clean room required by ISO 6-9, whose air supply volume is proportional to the number of ventilation times required by the grade of the clean room and the size of the space. ISO 0-5 The air supply volume of positive pressure one-way flow clean room is directly proportional to the cross-section wind speed and the cross-section area of air supply. Designers often use empirical formulas to calculate the air supply volume of clean room. Such empirical formulas are generally relatively conservative, and the selected parameters are relatively large. If the clean volume is reduced by 30%, the energy can be saved by 25%. It can be seen that the rational layout of clean rooms will bring obvious energy-saving effect.
2. On the premise of meeting the heat dissipation load generated by the operation of industrial production equipment and the operation of personnel, reducing the cross-section wind speed to the lowest. For the clean rooms running in real time all the year round, the full coverage rate is 60% for the clean rooms with 3000 square meters, and the effect of reducing the wind speed by 0.1 m/s is to reduce the air volume of 6480 m3 per hour. At the same time, the cooling capacity of treated air is significantly reduced.
3. For workshops with large demand for clean area, we can consider sub-regions and decentralized fresh air treatment so as to facilitate the operation of units in different regions if there is shutdown and maintenance, which can save energy and do not affect the normal operation of other regions.
4. Carefully investigate the heat load of industrial equipment, calculate and verify to determine the appropriate smaller air-conditioning cooling equipment. Do not simply take large coefficients for the sake of illustration. It causes waste of later operation.
5. For the large exhaust heat in the process, the static benefit analysis of energy saving can be carried out to consider whether the heat recovery method can be adopted.
6. For the process flow with different cleanliness level requirements, we can design the control of local high cleanliness environment requirements by means of micro-environment, clean shed and clean worktable, so as to reduce the area and space of high cleanliness with high energy consumption.
7. The fan of air conditioning system is operated by frequency conversion control mode. Because the flow Q is proportional to the first power of click speed V, the wind pressure H is proportional to the second power of click speed V, and the power P of motor shaft is proportional to the third power of motor speed V.
When a small air volume is needed, the input power of the motor will be reduced correspondingly when the fan speed is reduced by the frequency conversion control device. For example, the air volume will be reduced to 80%, the click speed (V) will also be reduced to 80%, and the shaft public (P) will be reduced to 51% of the rated power; if the air volume is reduced to 60%, the shaft power will be reduced to 22% of the rated power, which has the potential of energy saving. It's very powerful.
III. Refrigeration Equipment
As long as the energy consumption of the clean room is in the refrigeration load and fan operation load, it can be seen from the load index of the clean room that refrigeration and ventilation equipment basically account for 50% of the energy consumption of production. Choosing the appropriate refrigeration equipment can be achieved through energy, natural gas, waste heat absorption, steam, geothermal and other energy sources. The model can supply hot and cold water to the clean room wholly or partially. Through regional resources and comprehensive planning, the best refrigeration combination mode can be obtained. When choosing refrigeration units, the unit with higher COP value can be selected according to the actual demand as far as possible under the same working conditions.
4. Distributed Gas-fired CCHP System
Distributed gas-fired CCHP system is mainly composed of gas turbine equipment and waste heat utilization equipment. The gas turbine equipment is the core of the system, including gas turbine, internal combustion engine, etc. The waste heat utilization equipment includes waste heat boiler, absorption refrigerator, heat exchanger, electric refrigerator, gas boiler, etc. Its working principle is gas turbine. After power generation by burning natural gas, the high temperature flue gas generated is fed into the waste heat utilization equipment, which can be used for heating in winter, cooling in summer, and producing domestic hot water. The insufficient driving heat can be supplied by supplementary combustion gas.
When the demand for electricity, cold water and hot water is large in the cleanroom factory area, and the natural gas resources around the city are abundant, considering the price of natural gas and the policy of clean project comprehensively, we can use the combined cooling, heating and power supply system after economic accounting, and colleagues can also use the ice storage device and the heat storage device in conjunction with the ice storage device. In order to improve the energy-saving effect of the whole system, heat pump and other equipment configuration should be considered in a variety of ways.