Electronics Manufacturing Dustproof Room
Release time:2019-09-27 source:
With the development of computer, microelectronics and information technology, the rapid development of electronic manufacturing industry has been promoted, and the development of dust-free room technology has also been promoted. At the same time, higher requirements have been put forward for the design of dust-free room. The design of dust-free room in electronic manufacturing industry is a comprehensive technology. Only fully understand the dust-free room in electronic manufacturing industry. Only when the design is reasonable can the rate of defective products in the electronic manufacturing industry be reduced and the production efficiency be improved.
The characteristics of dust-free chamber in electronic manufacturing industry:
The requirements of cleanliness level are high. The air volume, temperature, humidity, pressure difference, equipment exhaust air are controlled on demand, illumination and cross-section wind speed of clean room are controlled according to design or specifications. In addition, the requirements of static electricity in this kind of clean room are extremely strict. Humidity is especially important. Because it is very easy to generate static electricity in the over-drying workshop, resulting in CMOS integration damage. Generally speaking, the temperature of the electronic workshop should be controlled at about 22 C, and the relative humidity should be controlled between 50 and 60%. (Special dust-free workshop has relevant temperature and humidity regulations.) This can effectively eliminate static electricity and make people feel comfortable. Chip production workshop, integrated circuit dust-free room and disk manufacturing workshop are important parts of dust-free room in electronic manufacturing industry. Because of the strict requirements of indoor air environment and quality in the manufacture and production of electronic products, the control of particulate matter and floating dust is the main object, and the temperature of its environment is also the main object. Humidity, fresh air volume and noise are strictly regulated.
1. The noise level (empty state) of the 10,000-grade dust-free room in an electronic manufacturer should not be greater than 65 dB (A).
2. The full coverage ratio of vertical flow clean room should not be less than 60% and horizontal one-way flow clean room should not be less than 40%, otherwise, local one-way flow.
3. The static pressure difference between clean room and outdoor of electronic factory should not be less than 10 Pa, and between clean area and non-clean area with different air cleanliness should not be less than 5 Pa.
4. Fresh air volume in 10,000 grade dust-free room in electronic manufacturing industry should be taken as the maximum of the following two items: (1) The sum of fresh air volume needed to compensate for indoor exhaust and maintain positive indoor pressure.
(2) Ensure that the fresh air per person per hour in the dust-free room is not less than 40 m3.
(3) The heater of clean air conditioning system in dust-free room of electronic manufacturing industry should be protected by fresh air and over-temperature power failure. If point humidification is adopted, the heater should be protected by anhydrous protection. In cold areas, the fresh air system should be protected by anti-freezing measures. The following three maximum values should be taken for the air supply volume of the dust-free room: the air supply quantity guaranteeing the air cleanliness grade of the dust-free room of the electronic manufacturing plant; the air supply quantity of the dust-free room of the electronic factory determined according to the calculation of heat and humidity load; and the fresh air quantity supplied to the dust-free room of the electronic manufacturing plant.